2nd Micromachine Summit
Programme

24-26 April 1996, Montreux, Switzerland
Wednesday, 24 April 1996

Wednesday, 24

Optional visit the CSEM and the IMT of the University of Neuchatel

Thursday, 25 April 1996

Country reviews

Scope of Micromachine

Standardization

Research and education

R&D Programmes and role of governments

Friday, 26 April 1996
Social & industrial impacts of micromachines

Needs expressed by the industry

Markets

Australia

• Bates, lan
  Professor
  Royal Melbourne Institute of Technology
  Faculty of Engineering

Canada

• Coderre, William
  Science & Technology Councillor
  Canadian Mission to the European Union
• Guild, Gordon
  President, Simon Fraser University
  Micromachining Technology Center Ltd.
• Jerominek, Hubert
  Head of Photonic Materials & ProcessesNational Optics Institute
• Lumb, Chris
  President, Alberta Microelectronics Centre

European Union

• Menozzi, Gaetan
  Marketing and Strategy Manager Sextant Avionique Div. Navigation Valence

France

• Axelrad, Constant
  CEA-DTA
• Clerc, Jean-Frederic
  Microsystem Programm Manager CEA I LETI
• Gagnepain, Jean-Jacques
  Directeur C.N.R.S.Departement Sciences pour l'Ingenieur (Spl)
• *Hauden, Daniel
  Directeur LPMO
• Lasseur, Jean
  Directeur, Schlumberger Etudes et Production
• Leclerc, J.
  Directeur, Sextant Avionique
• Puers, B.
  Head of technology Katholieke Universiteit Leuven
  Dept. Elektrotechniek Afdeling ESAT

Germany

• Blum, Hartmut
  Jenoptik Technologie GmbH
• Hu, Chang-Tze
  Director of German Office
  National Science Council, TaiwanRepresentative Office in Europe
• Menz, Wolfgang
  Professor, Albert-Ludwigs-Universitat Freiburg
  Institut fur Mikrosystemtechnik
• Mollendorf, Manfred
  Head of Microsystem Technology Robert Bosch GmbH
  Corporate R&D
• Schweitz, Jan-Ake
  Professor, Uppsala University Institute of Materials Science
• Paasche, Sascha
  Senior Manager Microelectronics & MSTDaimler-Benz AG Research and Technology

Great Britain

• Beardmore, Geoff
  Professor, Smiths Industries Ltd.
• Bertioli, Mike
  Director, Druck Ltd
• Dorey, Howard
  Professor, Imperial College of Science Technology and Medicine
• Lawes, Ronald A.
  Professor, Rutherford Appleton Laboratory Central Microstructure Facility
• Ohlkers, Per
  R&D Manager SensoNor A.S.

Italy

• Alessandretti, Giancarlo
  Director, Centro Ricerche Fiat Sistemi e technologie optomeccaniche
• D'Amico, Arnaldo
  Professor, Universita di Roma "Tor Vergata"
  Dip. Ingegneria Elettronica
• Foglietti, Vittorio
  IESS-CNR, I - Roma Soncini, Giovanni
  Professor University of Trento

Japan

• Hirano, Takayuki
  Executive Director, Micromachine Center
• Ishimaru, Tsuneo
  President, Nippondenso Co., Ltd.
• Moritomo, Sadao
  Vice-President, Seiko Instruments Inc.
• Nakajima, Naomasa
  Director, The University of Tokyo
  Dept. of Mechanical Engineering for Prod.
• Shimoyama, Toshiro
  Chairman, Olympus Optical Co., Ltd.

Switzerland

• De Rooij, Nicolaas F.
  Directeur, Universite de Neuchatel
• Dual, Jurg
  Professor, Institut for Mechanik
• Pfluger, Peter
  Chief Executive Officer, CSEM S.A Rohre, Heinrich
  IBM Research Laboratory
• Salathe, Rene Paul
  Director, EPFL Centre d'application Laser(CAL)

The Netherland

• Elders, Job
  Director, Twente MicroProducts
• Fluitman, Jan H.
  Director, University of Twente Mesa Institute
• Petersen, Jon Wulff
  Director, Mikroelektronic Centret
• Sygall, Petee
  Director, Philips Components Magnetic Heads & Modules

USA

• Crawford, Deborah
  Program Director, National Science Foundation
• Gabriel, Kaigham
  Deputy Director, DARPA Electronics Technology Office
• Giachino, Joseph M.
  Program Manager, Ford Motor Company
  Electronic Division
• Hocker, G. Benjamin
  Principal Research Fellow
  Honeywell Technology Center
• Muller, Richard
  Director, University of California Berkeley
  Berkeley Sensor & Actuator Center
• Najafi, Khalil
  University of Michigan, EECS

Country reviews
  There is a growing interest in MEMS in the countries presented. Nevertheless, industrial sectors are far better informed on the subject than politicians. Specific education in the MST field is in development.Most of the reviewed countries have research programs that are MST related although public expenditure in this area varies very much from country to country. Reliable figures arc difficult to assemble because of the breadth of MST projects or, in some cases, because of their confidential nature.The majority of the companies involved in MEMS are SMEs, although some very large companies are also active in this field.

Research and education
  Students should have a solid scientific background before in order to be proficient in the MST field.International mobility of both students and staff should be encouraged. The development of awareness to MST starts very early in Japan (elementary school). In Europe and in North America, MST education begins at the university level, mostly toward the end of undergraduate studies and at postgraduate level.Regarding research, systems development has become an important goal of the efforts on MEMS and micromachines.

Scope of micromachines
  There is no consensus on the definition of microsystems and micromachines. Finding a common language is therefore an important challenge. Microsystems can be good way to improve the image of technology in the public. Nevertheless, researchers have to be careful not to raise unrealistic expectations on the part of public or industry when they present their conceptions about the possible evolution of microsystems. It is important to avoid confusion between dreams and reality.

Standardization
  Standardization is necessary in order to promote the exchange of ideas and processes, but it does not have to inhibit the development of MEMS. There is clearly a need for concerted action on this subject, and how to approach this issue needs to be discussed.

R&D programs and role of governments.
 Japanese and American programs have some common points: they both support education, infrastructure availability and the flow of information among interested industries and academics.Europe also supports education in MST through its research facilities. As opposed to other countries, Japan funds risky and long-term research and development. MEMS have also many application in the defense field.

Social and industrial impact of micromachines.
 It is generally acknowledged that the social impact of micromachines will be considerable in the 21^st century, but there are signs that is has already began in many areas. Micromachines will make life easier in many ways.It was pointed out that micromachines will have dramatic effects on the field of health care. Minimally invasive surgery, intelligent drug delivery systems for external remote control and medication are two positive examples in which MST will make the lives of patients more comfortable and reduce their time in hospitals.Automobiles will benefit from micromachines technology and become safer and more comfortable.Information technology and telecommunication are other areas in which developments are closely related to miniaturization technologies.The expected wide use of microsystems for intelligent sensing and controlling in cars, houses, industrial equipment and entertainment goods will make it imperative that MST systems be implemented in simple, replacement-mode packages.More generally, micromachines will not solve unemployment problems. Micromachines can hardly be assembled by hand and their volume production will rely on highly automated production lines. Micromachines will generate a new industry which, unlike the present microelectronics industry, will consist initially of small and medium sized manufacturing companies.

Needs expressed by the industry.
 The industry has a considerable responsibility in the society, not only by the products put on the market, but also by the way to manufacture them. Micromachines can play a large role in creating human-friendly manufacturing procedures.Micromachines will provide solutions for plants maintenance with a minimum waste of time, for micro manufacturing of small products, minimizing energy, space and mineral resource consumption and for environmental protection, since industrial companies are highly responsible for preventing pollution.Micromachine technologies will allow the creation of smaller, safer, higher performance and more user-friendly products. In order to make advance in all fields necessary for the development of micromachines, industry encourages international cooperation and exchange of information.To introduce a micromachine or microsystem in a larger product, a company will normally not want to build up competence and manufacturing capacities for this component. Since it is in most of the case a key part of the final product, the company needs a reliable supplier for this component. This leads to the emergence of a new supply industry which needs to address specific issues that are more broadly based than those of the microelectronics supplying industry.

Markets.
 Some market forecasts published in the early 90's were overly optimistic. The present market for microsystems is dominated by microsensors, mostly for the automotive industry, which pulls the development of microsystems with its high production volume. Other examples can be found in computer peripherals, such as ink-jet printer heads and hard-disk heads or in the medical field with disposable blood pressure sensors.In many cases, the microsystem is a low-cost component that provides important added value to a final product.The future market of microsystems will be divided into a replacement sector in which a microsystem solution can bring better performance or lower cost, and a sector that introduces entirely new products.In the replacement market, the benefits of a new solution must be very important; it is usually difficult to replace a proven and mature product. New opportunities represent the best focus for microsystems technology in the next years. Across the broad scope of engineering systems, there are many recognized, but unmet needs that can be impacted by innovative micromachine technologies.The Japanese market has been estimated by the Micromachine Center to grow to about $ 5.7 billions for replacing products and $ 2 to 19 billions for new opportunities in 2005.

Next Micromachine Summit
 The delegates decided to continue to exchange opinions and information on an annual basis and to hold a 3rd World Micromachine Summit in 1997.In will be held in British Columbia, Canada, and will bring together delegations from countries active in the micromachine area around the world.The delegates also decided to appoint the Micromachine Center (J) to the permanent secretariat of the World Micromachine Summit.